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Load Port Smart SELOP-7

300/200mm Wafer Auto Switching Load Port
Smart SELOP-7
NEW Series LOAD PORT
200mm Wafer is also available to
300mm Wafer LP by just setting Open Cassette Adapter.

One Configuration Available in Both 300mm and 200mm.


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features

300/200mm Wafer mapping function (No Change Required)

Preventing mechanism for wafer protrusion.

Safety lock function to keep adapter door close when wafer is being transported.

自動(dòng)識(shí)別機(jī)能付

photo

  • 300mm Wafer FOUP or 200mm Wafer Open cassette

  • Automatically changes Load Port parameter and notify to Host


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