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Tape Frame FOUP Load Port

Tape Frame FOUP Load Port


features


High reliability , well experience

Load Port for 300mm is working in the front-end process in all over the world

Particle free

① Original Door opening technology prevents particle penetration
② Low vibration design

SEMI standard conformity

CID communication

*option

Adaptor for open cassette is available

*option

Supporting N2 purge function

*option

Supporting various Tape Frame FOUP

*Upon inquiry


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